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Peeling and lift-off device Product List

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Resist stripping and lift-off equipment for semiconductor miniaturization

Resist stripping and lift-off equipment for semiconductor miniaturization

High-precision and high-efficiency resist stripping equipment that supports the microfabrication process.

In the semiconductor industry, especially in the miniaturization process, the precision of resist removal significantly affects product quality. In the formation of fine patterns, the presence of resist residues or foreign substances can lead to critical defects. Our batch-type automatic resist stripping and lift-off equipment achieves high stripping performance and uniformity, contributing to improved yield. 【Application Scenarios】 - Fine wiring processing - Resist removal for high aspect ratio structures - Lift-off processing at the wafer level 【Benefits of Implementation】 - Improved yield - Stabilization of quality - Reduction of running costs

  • High pressure cleaner
  • Peeling and lift-off device

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Sheet-type automatic resist stripping and lift-off device for MEMS.

Sheet-type automatic resist stripping and lift-off device for MEMS.

Achieving both peeling performance and a compact footprint that supports high-precision MEMS manufacturing.

In the MEMS industry, as microfabrication technology advances, high precision and quality in the resist stripping and lift-off processes are required. In particular, the uniformity of the wafer surface and the suppression of contamination are crucial, and addressing these challenges is essential for improving product yield. This device achieves high stripping performance through the combination of heated organic solutions and high-pressure jets. It is a one-chamber system that contributes to high throughput and a reduced footprint. 【Application Scenarios】 - Resist stripping and lift-off processes in MEMS device manufacturing - Processes requiring high-precision pattern formation - Processes needing wafer surface uniformity and contamination control 【Benefits of Implementation】 - Improved yield due to high stripping performance - Increased efficiency of manufacturing lines through reduced footprint - Reduced running costs through the reuse of chemicals

  • High pressure cleaner
  • Peeling and lift-off device

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Resist stripping and lift-off equipment for semiconductor miniaturization.

Resist stripping and lift-off equipment for semiconductor miniaturization.

High-performance resist stripping equipment that supports the microfabrication process.

In the semiconductor industry's miniaturization process, precise stripping of the resist is essential. Particularly, as density increases, the presence of resist residues and foreign substances can significantly reduce yield. Our batch-type automatic resist stripping and lift-off equipment achieves high stripping performance through a combination of heated organic chemicals and high-pressure jets. 【Application Scenarios】 * Resist stripping in microfabrication processes * Research and development applications * Small-scale production 【Benefits of Implementation】 * Improved yield due to high stripping performance * Enhanced installation efficiency through space-saving design * Reduced running costs through chemical reuse

  • High pressure cleaner
  • Resist Device
  • Peeling and lift-off device

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Sheet-type automatic resist stripping and lift-off device for MEMS.

Sheet-type automatic resist stripping and lift-off device for MEMS.

Resist stripping and lift-off equipment supporting the manufacturing of high-precision MEMS devices.

In the MEMS industry, the quality of resist stripping and lift-off processes is crucial for the manufacturing of high-precision devices. Particularly in MEMS devices that utilize microfabrication technology, residual resist and uneven stripping can negatively impact product performance and reliability. Our batch-type automatic resist stripping and lift-off equipment achieves high-precision stripping performance by combining heated organic solutions with high-pressure jets for physical assistance. 【Usage Scenarios】 - Resist stripping and lift-off processes in MEMS device manufacturing - Resist removal in microfabrication processes - Resist stripping for research and development purposes 【Benefits of Implementation】 - Improved device quality through high-precision stripping - Increased productivity through high throughput - Reduced running costs through the reuse of solutions

  • High pressure cleaner
  • Resist Device
  • Peeling and lift-off device

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